For the nine months ended 31 March, the Japanese chip-equipment maker posted net profit of Y56.82bn, with revenue at Y169.54bn and pretax profit at Y80.45bn.
Operating profit slipped to Y78.19bn from Y79.29bn a year earlier, while earnings per share rose to Y632.49 from Y584.27.
The results were prepared under Japanese accounting standards, showing modest sales growth alongside improved bottom-line performance despite a slight decline in operating earnings.
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